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???????,???????????????????,“??????????????・???????????????1987?????????1990????????????????????????,???,?????,???????????????????,????????????????”
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20?????????????70??80??,???,??????????????,????
????????,????,?????????????1978????,??????????????????? (S&I) ????????????????????? PAS2000 (????????)???????????
???,??????1984??,???ASM?????1987??????????,???,??????CEO,??????????????ASML?????1988?,?????????1990???
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